Tunable MEMS inductor for power and communication systems | TechLink
Physical Modeling of MEMS Variable Inductor
What can you make with MEMS technology?
Micromachines | Free Full-Text | Analysis of the Failure and Performance Variation Mechanism of MEMS Suspended Inductors with Auxiliary Pillars under High-g Shock
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies | Microsystems & Nanoengineering
Failure mode analysis of MEMS suspended inductors under mechanical shock - ScienceDirect
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
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Design and analysis of a novel MEMS spiral inductor with high quality factor | SpringerLink
Micromachines | Free Full-Text | Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock | HTML
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies | Microsystems & Nanoengineering
EEE529:Microsystems RF MEMS Mamady Kebe. Introduction: Radio frequency microelectromechanical system refers to Electronic components at micro size scale; - ppt download
Design and simulation of a novel RF-MEMS tunable narrow band LC filter in the UHF band | SpringerLink
EP1788593A2 - Planar inductor using liquid metal mems technology - Google Patents